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Concept information

... > events and action > action > action with an object > manufacturing > microfabrication > lithography (microfabrication) > nanolithography

Preferred term

nanolithography  

Type

  • ysometa:Concept

Broader concept

Related concepts

Entry terms

  • nanoimprint lithography

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URI

http://www.yso.fi/onto/yso/p38917

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RDF/XML TURTLE JSON-LD Created 6/18/20