Concept information
Preferred term
kemisk gasfasdeponering
Type
-
ysometa:Concept
Broader concept
Narrower concepts
Entry terms
- CVD
- CVD-beläggning
- kemisk ångavsättning
- kemisk ångdeponering
Belongs to group
In other languages
-
English
-
CVD
-
Finnish
-
CVD
-
CVD-pinnoitus
-
kemiallinen kaasufaasikasvatus
URI
http://www.yso.fi/onto/yso/p39016
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