Concept information
Preferred term
atomikerroskasvatus
Type
-
YSO-käsite
Broader concept
Entry terms
- ALD-menetelmä
- ALD-tekniikka
Belongs to group
In other languages
-
English
-
Swedish
-
ALD-metoden
-
ALD-teknik
-
atomlagerdeponering
URI
http://www.yso.fi/onto/yso/p27468
{{label}}
{{#each values }} {{! loop through ConceptPropertyValue objects }}
{{#if prefLabel }}
{{/if}}
{{/each}}
{{#if notation }}{{ notation }} {{/if}}{{ prefLabel }}
{{#ifDifferentLabelLang lang }} ({{ lang }}){{/ifDifferentLabelLang}}
{{#if vocabName }}
{{ vocabName }}
{{/if}}