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KOKO Ontology

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Concept information

... > events and action > action > action with an object > manufacturing > microfabrication > lithography (microfabrication)
materiaalista luonti (fi) > manufacturing > microfabrication > lithography (microfabrication)

Preferred term

lithography (microfabrication)  

Type

  • YSO Concept

Broader concept

Narrower concepts

Entry terms

  • microlithography

In other languages

URI

http://www.yso.fi/onto/koko/p90906

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RDF/XML TURTLE JSON-LD Created 6/16/21, last modified 12/17/21