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Concept information

objects > systems > technical systems > micro-electromechanical systems

Preferred term

micro-electromechanical systems  

Type

  • YSO Concept

Broader concept

Entry terms

  • MEMS
  • microelectromechanical systems

In other languages

URI

http://www.yso.fi/onto/koko/p96849

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RDF/XML TURTLE JSON-LD Created 1/20/25, last modified 4/9/25