Concept information
Preferred term
Microtechnology
Type
-
Topical Descriptor
Broader concept
Narrower concepts
Entry terms
- Microfabrication
- Microfabrications
- Micromachining
- Micromachinings
- Micromanufacturing
- Micromanufacturings
Scope note
- Manufacturing technology for making microscopic devices in the micrometer range (typically 1-100 micrometers), such as integrated circuits or MEMS. The process usually involves replication and parallel fabrication of hundreds or millions of identical structures using various thin film deposition techniques and carried out in environmentally-controlled clean rooms.
History note
- 2009
In other languages
-
Finnish
-
Swedish
URI
http://www.yso.fi/onto/mesh/D055616
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