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Concept information

Preferred term

Microtechnology  

Type

  • Topical Descriptor

Narrower concepts

Entry terms

  • Microfabrication
  • Microfabrications
  • Micromachining
  • Micromachinings
  • Micromanufacturing
  • Micromanufacturings

Scope note

  • Manufacturing technology for making microscopic devices in the micrometer range (typically 1-100 micrometers), such as integrated circuits or MEMS. The process usually involves replication and parallel fabrication of hundreds or millions of identical structures using various thin film deposition techniques and carried out in environmentally-controlled clean rooms.

History note

  • 2009

In other languages

URI

http://www.yso.fi/onto/mesh/D055616

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