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Concept information

Equipment and Supplies > Electrical Equipment and Supplies > Micro-Electrical-Mechanical Systems
Technology, Industry, and Agriculture > Manufactured Materials > Micro-Electrical-Mechanical Systems

Preferred term

Micro-Electrical-Mechanical Systems  

Type

  • Topical Descriptor

Broader concept

Narrower concepts

Entry terms

  • MEMS
  • Micro-Electro-Mechanical System
  • Micro Electro Mechanical Systems
  • Micro-Electro-Mechanical Systems
  • System, Micro-Electro-Mechanical
  • Systems, Micro-Electro-Mechanical

Scope note

  • A class of devices combining electrical and mechanical components that have at least one of the dimensions in the micrometer range (between 1 micron and 1 millimeter). They include sensors, actuators, microducts, and micropumps.

History note

  • 2009

In other languages

URI

http://www.yso.fi/onto/mesh/D055617

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