Diehtu doahpagis
Ávžžuhuvvon tearbma
mikro-sähkömekaaniset laitteet
Tiipa
-
Aihe
Badjedoaba
Vuolledoahpagat
Stivrentearpmat
- mikroelektroniset mekaaniset laitteet
Eará gielain
-
English
-
MEMS
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Micro Electro Mechanical Systems
-
Micro-Electro-Mechanical System
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Micro-Electro-Mechanical Systems
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System, Micro-Electro-Mechanical
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Systems, Micro-Electro-Mechanical
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Swedish
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MEMS
URI
http://www.yso.fi/onto/mesh/D055617
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