Skip to main content

Search from vocabulary

Content language

Concept information

Preferred term

photolithography (microfabrication)  

Type

  • General concept

Entry terms

  • optical lithography (microfabrication)

URI

http://www.yso.fi/onto/yso/p38923

Download this concept:

RDF/XML TURTLE JSON-LD Created 6/18/20, last modified 8/28/21